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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

by Seongbo Shim, Youngsoo Shin Hardcover 1

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  • Author: Seongbo Shim, Youngsoo Shin
  • ISBN 13: 9783319762937
  • ISBN 10: 3319762931
  • Publication Year: 1
  • Language: English

Specifications

Index-10 3319762931
Index-13 9783319762937
Language English

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