Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
by Seongbo Shim, Youngsoo Shin Paperback 2019
- Author: Seongbo Shim, Youngsoo Shin
- ISBN 13: 9783030094553
- ISBN 10: 3030094553
- Publication Year: 2019
- Language: English
Specifications
| Index-10 | 3030094553 |
|---|---|
| Index-13 | 9783030094553 |
| Language | English |
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