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Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines

Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines

by Jeffrey Lang Hardcover 2009

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  • Author: Jeffrey Lang
  • ISBN 13: 9780387777467
  • ISBN 10: 0387777466
  • Publication Year: 2009
  • Language: English

Specifications

Index-100387777466
LanguageEnglish
Index-139780387777467
Period-
Class Track-
Publisher- (2009)
Pages-

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