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Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines

Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines

by Springer, Jeffrey Lang Paperback 2012

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  • Author: Springer, Jeffrey Lang
  • ISBN 13: 9781461424598
  • ISBN 10: 1461424593
  • Publication Year: 2012
  • Language: English

Specifications

Index-101461424593
LanguageEnglish
Index-139781461424598
Period-
Class Track-
Publisher- (2012)
Pages-

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