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Physics and Technology of Submicron Structures

Physics and Technology of Submicron Structures

by Helmut Heinrich, G. Bauer, Friedemar Kuchar, Günther Neubauer Paperback 2011

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  • Author: Helmut Heinrich, G. Bauer, Friedemar Kuchar, Günther Neubauer
  • ISBN 13: 9783642834332
  • ISBN 10: 3642834337
  • Publication Year: 2011
  • Language: English

Specifications

Index-103642834337
LanguageEnglish
Index-139783642834332
Period-
Class Track-
Publisher- (2011)
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