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Rare-Earth Implanted MOS Devices for Silicon Photonics : Microstructural, Electrical and Optoelectronic Properties

Rare-Earth Implanted MOS Devices for Silicon Photonics : Microstructural, Electrical and Optoelectronic Properties

by Lars Rebohle, Wolfgang Skorupa Paperback 2012

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  • Author: Lars Rebohle, Wolfgang Skorupa
  • ISBN 13: 9783642265587
  • ISBN 10: 3642265588
  • Publication Year: 2012
  • Language: English

Specifications

Index-10 3642265588
Index-13 9783642265587
Language English

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