Sensor-Based Modeling and Monitoring of Chemical Mechanical Polishing
by Prahalada Rao, Ranga Komanduri, Satish Bukkapatnam Paperback 1
- Author: Prahalada Rao, Ranga Komanduri, Satish Bukkapatnam
- ISBN 13: 9783639035643
- ISBN 10: 363903564X
- Publication Year: 1
- Language: English
Specifications
| Index-10 | 363903564X |
|---|---|
| Index-13 | 9783639035643 |
| Language | English |