3D and Circuit Integration of MEMS
by Masayoshi Esashi Hardcover 2021
- Author: Masayoshi Esashi
- ISBN 13: 9783527346479
- ISBN 10: 3527346473
- Publication Year: 2021
- Language: English
Specifications
| Index-10 | 3527346473 |
|---|---|
| Index-13 | 9783527346479 |
| Language | English |