Hf-Based High-K Dielectrics : Process Development, Performance Characterization, and Reliability

Hf-Based High-K Dielectrics : Process Development, Performance Characterization, and Reliability

by Jack C. Lee, Young-Hee Kim Paperback 2007

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  • Author: Jack C. Lee, Young-Hee Kim
  • ISBN 13: 9783031014246
  • ISBN 10: 3031014243
  • Publication Year: 2007
  • Language: English

Specifications

Index-10 3031014243
Index-13 9783031014246
Language English