Hf-Based High-K Dielectrics : Process Development, Performance Characterization, and Reliability
by Jack C. Lee, Young-Hee Kim Paperback 2007
- Author: Jack C. Lee, Young-Hee Kim
- ISBN 13: 9783031014246
- ISBN 10: 3031014243
- Publication Year: 2007
- Language: English
Specifications
| Index-10 | 3031014243 |
|---|---|
| Index-13 | 9783031014246 |
| Language | English |