Microelectromechanical Systems Vol. 1052 : Materials and Devices
by David A. LaVan, Mark G. da Silva, S. Mark Spearing, J. I. Duffy Hardcover 2008
- Author: David A. LaVan, Mark G. da Silva, S. Mark Spearing, J. I. Duffy
- ISBN 13: 9781558999909
- ISBN 10: 1558999906
- Publication Year: 2008
- Language: English
Specifications
Index-101558999906
LanguageEnglish
Index-139781558999909
Period-
Class Track-
Publisher- (2008)
Pages-