Chemical-Mechanical Polishing - Fundamentals and Challenges : Materials Research Society Symposium Proceedings
by S. V. Babu, S. Danyluk, M. I. Krishnan, M. Tsuiimura Hardcover 2000
- Author: S. V. Babu, S. Danyluk, M. I. Krishnan, M. Tsuiimura
- ISBN 13: 9781558994737
- ISBN 10: 1558994734
- Publication Year: 2000
- Language: English
Specifications
| Index-10 | 1558994734 |
|---|---|
| Index-13 | 9781558994737 |
| Language | English |
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