Chemical Physics of Thin Film Deposition Processes for Micro- And Nano-Technologies : Proceedings of the NATO Advanced Study Institute, Held in Kaunas

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Author: Y. Pauleau, NATO Advanced Study Institute on the Physics of Thin Film De
ISBN 13: 9781402005251
ISBN 10: 1402005253
Publication Year: 2002
Language: English

Index-101402005253

LanguageEnglish

Index-139781402005251

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Publisher- (2002)

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