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Tribology in Chemical-Mechanical Planarization

Tribology in Chemical-Mechanical Planarization

by Hong Liang, David Craven Hardcover 2005

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  • Author: Hong Liang, David Craven
  • ISBN 13: 9780824725679
  • ISBN 10: 0824725670
  • Publication Year: 2005
  • Language: English

Specifications

Index-10 0824725670
Index-13 9780824725679
Language English

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