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Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices

Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices

by Eric Garfunkel, Evgeni Gusev, Alexander Vul' Paperback 2001

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Author: Eric Garfunkel, Evgeni Gusev, Alexander Vul'
ISBN 13: 9780792350088
ISBN 10: 0792350081
Publication Year: 2001
Language: English

Specifications

Index-100792350081

LanguageEnglish

Index-139780792350088

Period-

Class Track-

Publisher- (2001)

Pages-