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Glow Discharge Processes : Sputtering and Plasma Etching

Glow Discharge Processes : Sputtering and Plasma Etching

by Brian Chapman Hardcover 1980

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  • Author: Brian Chapman
  • ISBN 13: 9780471078289
  • ISBN 10: 047107828X
  • Publication Year: 1980
  • Language: English

Specifications

Index-10047107828X
LanguageEnglish
Index-139780471078289
Period-
Class Track-
Publisher- (1980)
Pages-

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