Dielectric Films for Advanced Microelectronics
by Mikhail Baklanov, Karen Maex, Martin Green Hardcover 2007
- Author: Mikhail Baklanov, Karen Maex, Martin Green
- ISBN 13: 9780470013601
- ISBN 10: 0470013605
- Publication Year: 2007
- Language: English
Specifications
| Index-10 | 0470013605 |
|---|---|
| Index-13 | 9780470013601 |
| Language | English |