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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

by Jean Laconte, Denis Flandre, Jean-Pierre Raskin Hardcover 2006

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  • Author: Jean Laconte, Denis Flandre, Jean-Pierre Raskin
  • ISBN 13: 9780387288420
  • ISBN 10: 0387288422
  • Publication Year: 2006
  • Language: English

Specifications

Index-100387288422
LanguageEnglish
Index-139780387288420
Period-
Class Track-
Publisher- (2006)
Pages-

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