The Physics of Micro/Nano-Fabrication
by Ivor Brodie, Julius J. Muray Hardcover 1993
- Author: Ivor Brodie, Julius J. Muray
- ISBN 13: 9780306441462
- ISBN 10: 0306441462
- Publication Year: 1993
- Language: English
Specifications
| Index-10 | 0306441462 |
|---|---|
| Index-13 | 9780306441462 |
| Language | English |